The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6930391 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 16, 2005

Filed:

Aug. 27, 2002
Applicants:

Grant M. Kloster, Lake Oswego, OR (US);

Sean J. Hearne, Albuquerque, NM (US);

Inventors:

Grant M. Kloster, Lake Oswego, OR (US);

Sean J. Hearne, Albuquerque, NM (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L023/48 ;
U.S. Cl.
CPC ...
Abstract

An electroplated metal alloy including at least three elements. A multilayer interconnection structure that includes a substrate that is an interior of the interconnection structure, a conductive seed layer exterior to the substrate, and an electroplated metal alloy layer including at least three elements exterior to the conductive seed layer. A multilayer interconnection structure formed on a substrate, that includes a barrier layer, and a conductive seed layer, wherein the improvement includes an electroplated metal alloy layer including at least three elements. A method for forming a multilayer interconnection structure that includes providing a substrate, depositing a conductive seed layer, and electroplating a metal alloy layer including at least three elements exterior to the conductive seed layer.


Find Patent Forward Citations

Kloster, Grant. (2005). Method for alloy-electroplating group ib metals with refractory metals for interconnections (U.S. Patent No. 6930391). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6930391

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