The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Aug. 15, 2003
Applicants:
Hsien-tsong Chen, Junghe, TW;
Ming-shuo Yen, Hsinchu, TW;
Woan Tyng Hwang, Kaohsiung, TW;
Yu-chang Chen, Pingtung, TW;
Tien-tzu Wen, Hsinchu, TW;
Shion-feng Chang Chien, Kaohsiung, TW;
Inventors:
Hsien-Tsong Chen, Junghe, TW;
Ming-Shuo Yen, Hsinchu, TW;
Woan Tyng Hwang, Kaohsiung, TW;
Yu-Chang Chen, Pingtung, TW;
Tien-Tzu Wen, Hsinchu, TW;
Shion-Feng Chang Chien, Kaohsiung, TW;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L023/59 ;
U.S. Cl.
CPC ...
Abstract
A test keys structure comprises a plurality of test keys in scribe lines of a control monitor wafer. Between 50 and 400 test keys are formed on the control monitor wafer, and each of the plurality of test keys has an area of at least 1E6μm.