The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Jul. 16, 2002
Freidoon Mehrad, Plano, TX (US);
Zhihao Chen, Plano, TX (US);
Shashank S. Ekbote, Richardson, TX (US);
Brian Trentman, Sherman, TX (US);
Freidoon Mehrad, Plano, TX (US);
Zhihao Chen, Plano, TX (US);
Shashank S. Ekbote, Richardson, TX (US);
Brian Trentman, Sherman, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Disclosed is a shallow trench isolation (STI) structure and methods of manufacturing the same. The methods eliminate the requirement for design size adjustments (DSA) in manufacturing the STI structure. Further disclosed is an STI trench liner and methods for the formation thereof by growing a thin oxide layer on shallow isolation trench surfaces while preventing oxide formation on adjacent nitride surfaces, followed by the deposition of, and oxide growth upon, a polysilicon layer.