The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Jul. 28, 2003
Fang-yu Yeh, Taoyuan, TW;
Chi Lin, Taipei, TW;
Chuang-hsiang Chen, Taipei, TW;
ProMOS Technologies Inc., Hsinchu, TW;
Abstract
A method of manufacturing a semiconductor device is provided. First, a well region is formed in a substrate and then a mask layer is formed over the substrate. The mask layer and the substrate are patterned to form a first opening in the substrate. Thereafter, a threshold voltage adjustment process is performed. A gate dielectric layer, a first conductive layer and a second conductive layer are sequentially formed inside the first opening. The second conductive layer completely fills the first opening. A portion of the first conductive layer and the second conductive layer are removed so that the upper surface of the first conductive layer and the second conductive layer is slightly below the upper surface of the substrate and hence forms a second opening. A cap layer is formed in second opening and then the mask layer is removed. A source/drain region is formed in the substrate on each side of the first conductive layer. An inter-layer dielectric layer is formed over the substrate. Finally, using the cap layer as a self-aligned mask, a contact opening is formed in the inter-layer dielectric layer.