The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Aug. 15, 2002
Minoru Yoshida, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Kaoru Sakai, Yokohama, JP;
Takafumi Okabe, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Kaoru Sakai, Yokohama, JP;
Takafumi Okabe, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An apparatus for inspecting pattern defects on microscopic circuit patterns, with high resolution, comprises: an objective lens for detecting an image of a sample; a UV laser beam illumination arrangement for illuminating onto a pupil of the objective lens; am arrangement for lowering coherency of the UV laser illumination; a detector of integration type; and an arrangement for processing detected signal thereof.