The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Mar. 10, 2004
Swaminathan Sivakumar, Portland, OR (US);
Oleg Golonzka, Beaverton, OR (US);
Timothy F. Crimmins, Portland, OR (US);
Swaminathan Sivakumar, Portland, OR (US);
Oleg Golonzka, Beaverton, OR (US);
Timothy F. Crimmins, Portland, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Defective contact plug fills can be detected by applying an etching solution, which in some embodiments preferentially etches in the <111> direction. The etching solution is some embodiments may also produce a characteristic type of undercutting underneath the contact plug fill. Contact plug fills with defects in them have undercutting underneath as a result of the etchant exposure, while defective contact plug fills have no such undercutting. The contact plug fills that are now undercut by etching exposure are unable to dissipate surface charge or surface applied potential and can be detected using voltage contrast methods or conventional electrical testing techniques, for example.