The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Mar. 22, 2002
Applicants:
Douglas W. Young, Sunnyvale, CA (US);
Brett E. Mcgrath, San Jose, CA (US);
Yuchun Wang, San Jose, CA (US);
Inventors:
Douglas W. Young, Sunnyvale, CA (US);
Brett E. McGrath, San Jose, CA (US);
Yuchun Wang, San Jose, CA (US);
Assignee:
ASM Nutool, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B001/00 ;
U.S. Cl.
CPC ...
Abstract
The present invention relates to methods and apparatus that allow for chemical mechanical polishing using a flexible pad and variable fluid flow for variable polishing.