The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Aug. 19, 2002
Michael L. Miller, Cedar Park, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Richard J. Markle, Austin, TX (US);
Brian K. Cusson, Austin, TX (US);
Patrick M. Cowan, Pflugerville, TX (US);
Timothy L. Jackson, Pflugerville, TX (US);
Naomi M. Jenkins, Round Rock, TX (US);
Michael L. Miller, Cedar Park, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Richard J. Markle, Austin, TX (US);
Brian K. Cusson, Austin, TX (US);
Patrick M. Cowan, Pflugerville, TX (US);
Timothy L. Jackson, Pflugerville, TX (US);
Naomi M. Jenkins, Round Rock, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method and apparatus is provided for a process control based on an estimated process result. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and estimating at least one process result of the workpiece based on at least a portion of the received trace data. The method further comprises adjusting processing of a next workpiece based on the estimated at least one process result.