The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Apr. 29, 2004
Avner Karpol, Ziona, IL;
Silviu Reinhorn, Mevaseret Zion, IL;
Emanuel Elysaf, Rehovot, IL;
Shimon Yalov, Holon, IL;
Boaz Kenan, Rehovot, IL;
Avner Karpol, Ziona, IL;
Silviu Reinhorn, Mevaseret Zion, IL;
Emanuel Elysaf, Rehovot, IL;
Shimon Yalov, Holon, IL;
Boaz Kenan, Rehovot, IL;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for reducing speckle during inspection of articles used in the manufacture of semiconductor devices, including wafers, masks, photomasks, and reticles. The coherence of a light beam output by a coherent light source, such as a pulsed laser, is reduced by disposing elements in a light path. Examples of such elements include optical fiber bundles; optical light guides; optical gratings; an integrating sphere; and an acousto-optic modulator. These various elements may be combined as desired, such that light beams output by the element combinations have optical path length differences that are greater than a coherence length of the light beam output by the coherent light source.