The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Nov. 13, 2003
Jun Lin, Kawasaki, JP;
Chung-ming Chu, Hsinchu, TW;
Toshiya Suzuki, Kawasaki, JP;
Katsuhiko Hieda, Yokohama, JP;
Jun Lin, Kawasaki, JP;
Chung-Ming Chu, Hsinchu, TW;
Toshiya Suzuki, Kawasaki, JP;
Katsuhiko Hieda, Yokohama, JP;
Fujitsu Limited, Kawasaki, JP;
Winbond Electronics Corp., Hsinchu, TW;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A method for fabricating a capacitor comprises the steps of: forming a lower electrode of a metal over a substrate; forming a capacitor dielectric film of an oxide dielectric film on the lower electrode; depositing a metal film on the capacitor dielectric film; performing a thermal processing in a hydrogen-content atmosphere after the step of depositing the metal film; and patterning the metal film to form an upper electrode of the metal film after the step of performing the thermal processing. Thus, the adhesion between the upper electrode and the capacitor dielectric film is improved, and capacitor characteristics can be improved.