The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
May. 30, 2001
Naoaki Ogure, Tokyo, JP;
Kuniaki Horie, Kanagawa, JP;
Yuji Araki, Kanagawa, JP;
Hiroshi Nagasaka, Kanagawa, JP;
Momoko Kakutani, Tokyo, JP;
Tohru Satake, Kanagawa, JP;
Naoaki Ogure, Tokyo, JP;
Kuniaki Horie, Kanagawa, JP;
Yuji Araki, Kanagawa, JP;
Hiroshi Nagasaka, Kanagawa, JP;
Momoko Kakutani, Tokyo, JP;
Tohru Satake, Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Abstract
There is provided a method of performing a surface treatment, such as coating, denaturation, modification and etching, on a surface of a substrate. The method comprises the steps of bringing a surface treatment gas into contact with a surface of a substrate, and irradiating the surface of the substrate with a fast particle beam to enhance an activity of the surface and/or the surface treatment gas, thereby facilitating a reaction between the surface and the gas. The fast particle beam may be selected from a group consisting of an electron beam, a charged particle beam, an atomic beam and molecular beam. For example, during a coating operation, chemical deposition of predetermined component elements of the gas onto the surface is effected and a predetermined portion of the surface of the substrate is irradiated with a particle beam to form a coating layer on the predetermined portion.