The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
Jun. 06, 2003
Brian J. Brown, Palo Alto, CA (US);
Madhavi Chandrachood, Sunnyvale, CA (US);
Radha Nayak, Santa Clara, CA (US);
Fred C. Redeker, Fremont, CA (US);
Michael Sugarman, San Francisco, CA (US);
John M. White, Hayward, CA (US);
Brian J. Brown, Palo Alto, CA (US);
Madhavi Chandrachood, Sunnyvale, CA (US);
Radha Nayak, Santa Clara, CA (US);
Fred C. Redeker, Fremont, CA (US);
Michael Sugarman, San Francisco, CA (US);
John M. White, Hayward, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A scrubber device is provided. The scrubber device may etch a backside of a wafer and may clean a frontside of the wafer simultaneously. The scrubber device may comprise a programmed controller adapted to supply a non-etching fluid to a frontside of the wafer whenever an etching fluid is supplied to the backside of the wafer.