The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2005
Filed:
Feb. 13, 2003
Keith Frank Best, Prunedale, CA (US);
Alexander Friz, San Jose, CA (US);
Joseph J. Consolini, Costa Mesa, CA (US);
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Cheng-qun Gui, Best, NL;
Keith Frank Best, Prunedale, CA (US);
Alexander Friz, San Jose, CA (US);
Joseph J. Consolini, Costa Mesa, CA (US);
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Cheng-Qun Gui, Best, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
To align between layers having a large Z separation, an alignment system which illuminates reference markers with normally incident radiation is used. The alignment system has an illumination system that is telecentric on the substrate side.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile