The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2005
Filed:
Jul. 12, 2000
BO Zheng, San Jose, CA (US);
Hougong Wang, Pleasanton, CA (US);
Girish Dixit, San Jose, CA (US);
Fusen Chen, Saratoga, CA (US);
Bo Zheng, San Jose, CA (US);
Hougong Wang, Pleasanton, CA (US);
Girish Dixit, San Jose, CA (US);
Fusen Chen, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and associated apparatus includes depositing metal on a plating surface of an object immersed in an electrolyte solution prior to bulk deposition on the plating surface. In one aspect, the method further includes applying a voltage between an anode and the plating surface to enhance the concentration of metal ions in the electrolyte solution that is contained in a feature on the plating surface prior to the bulk deposition on the plating surface.