The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Aug. 09, 2002
Applicants:
Panayotis C. Andricacos, Croton-on-Hudson, NY (US);
Steven H. Boettcher, Fishkill, NY (US);
Fenton Read Mcfeely, Ossining, NY (US);
Milan Paunovic, Port Washington, NY (US);
Inventors:
Panayotis C. Andricacos, Croton-on-Hudson, NY (US);
Steven H. Boettcher, Fishkill, NY (US);
Fenton Read McFeely, Ossining, NY (US);
Milan Paunovic, Port Washington, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
B05D005/12 ; H01L021/44 ; C23C014/32 ;
U.S. Cl.
CPC ...
Abstract
An interconnection structure comprising a substrate having a dielectric layer with a via opening therein; a barrier layer located in the via opening; an interlayer of palladium and/or platinum on the barrier layer; and a layer of copper or copper alloy on the interlayer is provided.