The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2005
Filed:
Jun. 05, 2003
Henrikus Herman Marie Cox, Eindhoven, NL;
Robertus Nicodemus Jacobus Van Ballegoij, Eindhoven, NL;
Petrus Matthijs Henricus Vosters, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Sebastiaan Maria Johannes Cornelissen, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Robertus Nicodemus Jacobus Van Ballegoij, Eindhoven, NL;
Petrus Matthijs Henricus Vosters, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Sebastiaan Maria Johannes Cornelissen, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz.