The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2005
Filed:
Jul. 01, 2002
Oliver Kienzle, Aalen, DE;
Dirk Stenkamp, Essingen, DE;
Michael Steigerwald, Aalen, DE;
Rainer Knippelmeyer, Aalen, DE;
Max Haider, Gaiberg, DE;
Heiko Müller, Heidelberg, DE;
Stephan Uhlemann, Heidelberg, DE;
Oliver Kienzle, Aalen, DE;
Dirk Stenkamp, Essingen, DE;
Michael Steigerwald, Aalen, DE;
Rainer Knippelmeyer, Aalen, DE;
Max Haider, Gaiberg, DE;
Heiko Müller, Heidelberg, DE;
Stephan Uhlemann, Heidelberg, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An examining system for imaging an object positionable in an object plane, includes an illumination device for supplying energy to a delimited field of the object such that charged particles emerge from locations of the field, the field being displaceable in the plane of the object, a first deflector for providing a variable deflection field for guiding charged particles emerging from locations of a selectable region of the object through a fixed, predetermined beam cross-section, and a position-sensitive detector disposed in the beam path such that the charged particles, after having passed through the first deflector, impinge on the position-sensitive detector, wherein particles emerging from different locations of the region are imaged on different locations of the position-sensitive detector which are allocated to the locations of emergence.