The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2005
Filed:
Mar. 13, 2003
Theodorus Gerardus Maria Oosterlaken, Oudewater, NL;
Frank Huussen, Bilthoven, NL;
Timothy Robert Landsmeer, Utrecht, NL;
Herbert Terhorst, Amersfoort, NL;
Theodorus Gerardus Maria Oosterlaken, Oudewater, NL;
Frank Huussen, Bilthoven, NL;
Timothy Robert Landsmeer, Utrecht, NL;
Herbert Terhorst, Amersfoort, NL;
ASM International, N.V., Bilthoven, NL;
Abstract
A pedestal for use in a high temperature vertical furnace for the processing of semiconductor wafers provides a closure and heat insulation for the lower end of the furnace and is a wafer boat support. The pedestal, comprising quartz-enveloped insulation material, supports a wafer boat at a boat support level and is provided with an upper section disposed above the boat support level. The upper section comprises enveloped insulating material. The envelope of the upper section is also formed of quartz and the insulating material in the upper section has a lower thermal conductance than the insulating material in a lower quartz enveloped section.