The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2005
Filed:
Dec. 19, 2003
Applicants:
Bill H Quon, Brea, CA (US);
Samuel S. Antley, Cottonwood, AZ (US);
Andrej S Mitrovic, Phoenix, AZ (US);
Inventors:
Bill H Quon, Brea, CA (US);
Samuel S. Antley, Cottonwood, AZ (US);
Andrej S Mitrovic, Phoenix, AZ (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B037/02 ; F04B023/00 ; C23C016/00 ;
U.S. Cl.
CPC ...
Abstract
A closed-drift Hall effect plasma vacuum pump includes one or more pumping conduits which are linked with a radial magnetic field. The magnetic field separates a plasma from a plasma at a higher pressure which is formed by cross-field plasma transport from a plasma processing region.