The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Sep. 30, 2002
Michael Bruce, Austin, TX (US);
Gregory A. Dabney, Austin, TX (US);
Palaniappan Muthupalaniappan, Singapore, SG;
Jiann Min Chin, Singapore, SG;
Richard Jacob Wilcox, Austin, TX (US);
Glen Gilfeather, Del Valle, TX (US);
Brennan Davis, Austin, TX (US);
Jacob Phang, Singapore, SG;
Choon Meng Chua, Singapore, SG;
Lian Ser Koh, Singapore, SG;
Hoo-yin NG, Singapore, SG;
Soon Huat Tan, Singapore, SG;
Michael Bruce, Austin, TX (US);
Gregory A. Dabney, Austin, TX (US);
Palaniappan Muthupalaniappan, Singapore, SG;
Jiann Min Chin, Singapore, SG;
Richard Jacob Wilcox, Austin, TX (US);
Glen Gilfeather, Del Valle, TX (US);
Brennan Davis, Austin, TX (US);
Jacob Phang, Singapore, SG;
Choon Meng Chua, Singapore, SG;
Lian Ser Koh, Singapore, SG;
Hoo-Yin Ng, Singapore, SG;
Soon Huat Tan, Singapore, SG;
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Semicaps Pte Ltd., Singapore, SG;
Abstract
Apparatus for and methods of inspection using laser beam induced alteration are provided. In one aspect, an apparatus is provided that includes a laser scanning microscope for directing a laser beam at a circuit structure and a source for biasing and thereby establishing a power condition in the circuit structure. A detection circuit is provided for detecting a change in the power condition in response to illumination of the circuit structure by the laser beam and generating a first output signal based on the detected change. A signal processor is provided for processing the first output signal and generating a second output signal based thereon. A control system is operable to scan the laser beam according to a pattern that has a plurality of pixel locations, whereby the laser beam may be moved to a given pixel location and allowed to dwell there for a selected time before being moved to another pixel location.