The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Feb. 12, 2002
Franz Sorg, Aalen, DE;
Stefan Xalter, Oberkochen, DE;
Frank Melzer, Utzmemmingen, DE;
Bernhard Gellrich, Aalen, DE;
Michael Muehlbeyer, Aalen, DE;
Franz Sorg, Aalen, DE;
Stefan Xalter, Oberkochen, DE;
Frank Melzer, Utzmemmingen, DE;
Bernhard Gellrich, Aalen, DE;
Michael Muehlbeyer, Aalen, DE;
Carl Zeiss SMT AG, , DE;
Abstract
In a system for overcoming or at least damping oscillations in or through channels () which carry fluid in a component, in particular coolant in cooling channels in an optical element (), in particular a projection objective lens () for semiconductor lithography, oscillations which occur are detected and evaluated by sensors (), after which the result is passed, in the form of an adaptronic control loop to piezoelectric elements (), which are integrated in the optical element, and are in the form of thin plates, films or layers which, when activated, produce the oscillations or frequencies which counteract oscillations and natural frequencies produced by the turbulence.