The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Feb. 12, 2003
Boris Yokhin, Nazareth Illit, IL;
Alexander Dikopoltsev, Haifa, IL;
Tzachi Rafaeli, Givat Shimshit, IL;
Amos Gvirtzman, Moshav Zippori, IL;
Boris Yokhin, Nazareth Illit, IL;
Alexander Dikopoltsev, Haifa, IL;
Tzachi Rafaeli, Givat Shimshit, IL;
Amos Gvirtzman, Moshav Zippori, IL;
Jordan Valley Applied Radiation Ltd., Migdal Haemek, IL;
Abstract
Apparatus for inspection of a sample includes a radiation source and an array of detector elements arranged to receive radiation from the surface due to irradiation of an area of the surface by the radiation source. The array has a first operative configuration for resolving the received radiation along a first axis perpendicular to the surface, and a second operative configuration for resolving the received radiation along a second axis parallel to the surface. A signal processor processes the signal from the detector array in the two configurations so as to determine a reflectance of the surface as a function of elevation angle relative to the surface and a scattering profile of the surface as a function of azimuthal angle in a plane of the surface.