The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Apr. 24, 2000
David L. Chapek, Boise, ID (US);
John T. Moore, Boise, ID (US);
David L. Chapek, Boise, ID (US);
John T. Moore, Boise, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
The present invention relates generally to removing an undesirable second oxide, while minimally affecting a desirable first oxide, on an integrated circuit. The integrated circuit may be part of a larger system. The second oxide is first converted to another material, such as oxynitride. The other material has differing characteristics, such as etching properties, so that it can then be removed, without substantially diminishing the first oxide. The conversion may be accomplished by heating. Heating may be accomplished by rapid thermal or furnace processing. Subsequently, the other material is removed from the integrated circuit, for example by hot phosphoric etching, so that the desirable first oxide is not substantially affected.