The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2005

Filed:

Apr. 01, 2003
Applicants:

Ruriko Tsuneta, Kokubunji, JP;

Masanari Koguchi, Kunitachi, JP;

Isao Nagaoki, Hitachinaka, JP;

Hiroyuki Kobayashi, Mito, JP;

Inventors:

Ruriko Tsuneta, Kokubunji, JP;

Masanari Koguchi, Kunitachi, JP;

Isao Nagaoki, Hitachinaka, JP;

Hiroyuki Kobayashi, Mito, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J037/26 ; G21K007/00 ;
U.S. Cl.
CPC ...
Abstract

The present invention provides an analysis of displacement by calculating the phase variance image P' (k, l) between Fourier transformed images of paired images S(n, m) and S(n, m) to determine the center of gravity of δ peak appearing on the invert Fourier transform image of the images. The present invention provides numerous advantages such as a precision of displacement analysis of a fraction of pixel to thereby allow to improve the precision of focal analysis, or reduced number of pixels required to achieve the same precision, evaluation of reliability of the analysis by using the δ peak intensity, influence of varying background reduced by using a phase variance component. The improved performance by the present invention allows any operator skilled or not to achieve a best focusing.


Find Patent Forward Citations

Loading…