The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2005
Filed:
Mar. 06, 2003
Petrus C.m. Frissen, Eindhoven, NL;
Johan C. Compter, Eindhoven, NL;
Antonius T.a. Peijnenburg, Eindhoven, NL;
Erik R. Loopstra, Heeze, NL;
Petrus C.M. Frissen, Eindhoven, NL;
Johan C. Compter, Eindhoven, NL;
Antonius T.A. Peijnenburg, Eindhoven, NL;
Erik R. Loopstra, Heeze, NL;
ASML Netherlands B.V., , NL;
Abstract
A positioning device comprising a first part () which is movable relatively to a second part () in an X-direction and a Y-direction, said first part () comprising a carrier () on which a system of magnets () is arranged according to a pattern of rows () and columns () extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row () and each column () rotates 90° counter-clockwise. The second part () comprises an electric coil system () with two types of electric coils (C, C), one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.