The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Mar. 04, 2002
Paul E. Brunemeier, Sunnyvale, CA (US);
Archita Sengupta, San Jose, CA (US);
Justin F. Gaynor, San Jose, CA (US);
Robert H. Havemann, Pleasanton, CA (US);
Paul E. Brunemeier, Sunnyvale, CA (US);
Archita Sengupta, San Jose, CA (US);
Justin F. Gaynor, San Jose, CA (US);
Robert H. Havemann, Pleasanton, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A composition comprises a first component that provides a predetermined response to radiation, and a second component. Upon curing of the composition, portions of the first component bind together portions of the second component to form an inhomogeneous material having physical properties substantially determined by the second component. The function provided by the first component's response to radiation and the macroscopic properties determined by the second component are largely decoupled and thus may be separately optimized. Some embodiments provide photo-patternable low dielectric constant materials that may be advantageously employed in metal interconnect layers in integrated circuits, for example.