The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Feb. 20, 2002
Eugene Y. Ivanov, Grove City, OH (US);
David B. Smathers, Columbus, OH (US);
Charles E. Wickersham, Jr., Columbus, OH (US);
Lin Zhu, Grove City, OH (US);
Eugene Y. Ivanov, Grove City, OH (US);
David B. Smathers, Columbus, OH (US);
Charles E. Wickersham, Jr., Columbus, OH (US);
Lin Zhu, Grove City, OH (US);
Tosoh SMD, Inc., Grove City, OH (US);
Abstract
A method of constructing increased life sputter targets and targets made by the method are disclosed. The method comprises starting with a precursor target design or profile and making magnetic field strength measurements along the radial surface of same and at a plurality of vertical dimensions above the surface. An optimal magnetic field strength ratio is provided between the erosion tracks of the target. The vertical dimension of the material to be added to one of the erosion tracks is determined and then the height of the other erosion track is calculated by utilizing this optimal magnetic field strength ratio.