The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2005
Filed:
May. 28, 2002
Applicants:
Takayuki Toshima, Nirasaki, JP;
Naoki Shindo, Nirasaki, JP;
Tadashi Iino, Nirasaki, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/306 ; C23F001/00 ;
U.S. Cl.
CPC ...
Abstract
After semiconductor wafers W have been processed with ozone gas and steam fed into a processing vessel, air is fed into the processing vesselfrom an air supply source connected to an ozone gas supply pipefor feeding ozone gas into the processing vessel, whereby an atmosphere of the ozone gas in the processing vesselis replaced with an atmosphere of the air.