The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2005
Filed:
Nov. 21, 2002
Lawrence C. Lei, Milpitas, CA (US);
Alfred W. Mak, Union City, CA (US);
Gwo-chuan Tzu, Sunnyvale, CA (US);
Avi Tepman, Cupertino, CA (US);
Ming Xi, Sunnyvale, CA (US);
Walter Benjamin Glenn, Pacifica, CA (US);
Lawrence C. Lei, Milpitas, CA (US);
Alfred W. Mak, Union City, CA (US);
Gwo-Chuan Tzu, Sunnyvale, CA (US);
Avi Tepman, Cupertino, CA (US);
Ming Xi, Sunnyvale, CA (US);
Walter Benjamin Glenn, Pacifica, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present invention generally relate to a clamshell and small volume chamber with a fixed substrate support. One embodiment of a processing chamber includes a fixed substrate support having a substrate receiving surface, a pumping ring disposed around a perimeter of the substrate receiving surface, and a gas distribution assembly disposed over the fixed substrate support. The pumping ring forms at least a portion of a pumping channel and has one or more apertures formed therethrough. The chamber may further include a gas-flow diffuser disposed radially inward of the apertures of the pumping ring. Another embodiment of a processing chamber includes a first assembly comprising a fixed substrate support and a second assembly comprising a gas distribution assembly. The first assembly includes a first assembly body that is shaped and sized so that at least a portion of the first assembly body is below the substrate receiving surface of the substrate support. A hinge assembly couples the first assembly and the second assembly. The first assembly and the second assembly can be selectively positioned between an open position and a closed position.