The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Jun. 03, 2003
Applicants:
Wai Lo, Lake Oswego, OR (US);
James P. Kimball, Troutdale, OR (US);
Verne C. Hornback, Camas, WA (US);
Inventors:
Wai Lo, Lake Oswego, OR (US);
James P. Kimball, Troutdale, OR (US);
Verne C. Hornback, Camas, WA (US);
Assignee:
LSI Logic Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/283 ; H01L021/31 ;
U.S. Cl.
CPC ...
Abstract
A method of making a thin gate dielectric includes providing a metal silicate on a silicon substrate. Nitrogen is implanted into the metal silicate.