The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2005
Filed:
Jul. 20, 2001
Jalal Ashjaee, Cupertino, CA (US);
Homayoun Talieh, San Jose, CA (US);
Bulent Basol, Manhatten Beach, CA (US);
Konstantin Volodarsky, San Francisco, CA (US);
Jalal Ashjaee, Cupertino, CA (US);
Homayoun Talieh, San Jose, CA (US);
Bulent Basol, Manhatten Beach, CA (US);
Konstantin Volodarsky, San Francisco, CA (US);
ASM-Nutool, Inc., Milpitas, CA (US);
Abstract
The present invention provides a wafer carrier that includes an opening, which in one embodiment is a plurality of holes, disposed along the periphery of the wafer carrier. A gas emitted through the holes onto a peripheral back edge of the wafer assists in preventing the processing liquids and contaminants resulting therefrom from reaching the inner region of the base and the backside inner region of the wafer. In another embodiment, a plurality of concentric sealing members are used to prove a better seal, and the outer seal is preferably independently movable to allow cleaning of a peripheral backside of the wafer to occur while the wafer is still attached to the wafer carrier.