The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2005
Filed:
Feb. 07, 2003
Boris Fuksshimov, San Jose, CA (US);
Jeff P Rudd, San Jose, CA (US);
Charles C Garretson, San Jose, CA (US);
Brian J Brown, Palo Alto, CA (US);
Boris Fuksshimov, San Jose, CA (US);
Jeff P Rudd, San Jose, CA (US);
Charles C Garretson, San Jose, CA (US);
Brian J Brown, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a first aspect of the invention, a polishing device is provided. The polishing device includes a platen adapted to support a polishing pad and also includes a source of polishing slurry. Also included in the polishing device is a slurry supply line adapted to supply the polishing slurry from the source of polishing slurry to the polishing pad. The polishing device includes a pressure transducer installed along the slurry supply line and adapted to detect a pressure inside the slurry supply line. Numerous other aspects are provided.