The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Mar. 10, 2003
Derek Coon, Redwood City, CA (US);
Bernard Fay, Sarasota, FL (US);
Derek Coon, Redwood City, CA (US);
Bernard Fay, Sarasota, FL (US);
Nikon Corporation, , JP;
Abstract
An optical assembly () for directing and/or focusing a beam of light energy for an exposure apparatus () includes an optical housing () and one or more optical elements () that cooperate to form an optical cavity () having one or more stagnant flow areas (). The optical assembly () also includes one or more flow diverters () for improving the flow a replacement fluid () in the stagnant flow areas () of the optical cavity () during purging of the optical assembly () with the replacement fluid ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile