The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Apr. 02, 2002
Hideki Naruoka, Tokyo, JP;
Nobuyoshi Hattori, Tokyo, JP;
Hidekazu Yamamoto, Tokyo, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A boat () has a recess () for supporting a laminated wafer (). The recess () has a first side surface (), a first bottom surface (), a second side surface (), a second bottom surface () and a third side surface (). Viewing from an upper surface of the boat (), the second bottom surface () is located in a position lower than the first bottom surface (). The laminated wafer () is mounted on the boat () in the state that a side surface of a first silicon wafer () is not in contact with the second bottom surface () of the recess () and a side surface of a second silicon wafer () is in contact with the first bottom surface () of the recess (). A second main surface () of the second silicon wafer () is in contact with the first side surface () of the recess () and a second main surface () of the first silicon wafer () is in contact with the third side surface () of the recess ().