The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Jan. 09, 2002
Joseph E. Oberlander, Phillipsburg, NJ (US);
Ralph R. Dammel, Flemington, NJ (US);
Shuji Ding-lee, Branchburg, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Medhat A. Toukhy, Flemington, NJ (US);
Joseph E. Oberlander, Phillipsburg, NJ (US);
Ralph R. Dammel, Flemington, NJ (US);
Shuji Ding-Lee, Branchburg, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Medhat A. Toukhy, Flemington, NJ (US);
Clariant Finance (BVI) Limited, Tortola, VG;
Abstract
The present invention relates to a novel absorbing, photoimageable and aqueous developable positive-working antireflective coating composition comprising a photoacid generator and a polymer comprising at least one unit with an acid labile group and at least one unit with an absorbing chromophore. The invention further relates to a process for using such a composition. The present invention also relates to a novel absorbing, photoimageable and aqueous alkali developable positive-working antireflective coating composition comprising a polymer comprising at least one unit with an acid labile group, a dye and a photoacid generator. The invention further relates to a process for using such a composition. The invention also relates to a novel process for forming a positive image with a positive photoresist and a novel photoimageable and aqueous developable positive-working antireflective coating composition, where the antireflective coating comprises a polymer comprising an acid labile group. The invention further relates to such a composition. The invention also relates to a process for imaging a photoimageable antireflective coating composition.