The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 2005

Filed:

Dec. 12, 2002
Applicants:

Steven B. Herschbein, Hopewell Junction, NY (US);

Herschel M. Marchman, Poughquag, NY (US);

Chad Rue, Poughkeepsie, NY (US);

Michael R. Sievers, Poughkeepsie, NY (US);

Inventors:

Steven B. Herschbein, Hopewell Junction, NY (US);

Herschel M. Marchman, Poughquag, NY (US);

Chad Rue, Poughkeepsie, NY (US);

Michael R. Sievers, Poughkeepsie, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C10B 100 ; H01L 21302 ;
U.S. Cl.
CPC ...
Abstract

A method and structure for an apparatus for removing metal from an integrated circuit structure is disclosed. A container holds an integrated circuit structure that has a metal portion. An electronic device connected to the container produces an electronic field proximate to a limited region of the metal portion. A first supply connected to the container supplies an oxidizing agent within the container. A solvent supply connected to the container supplies solvent to the limited region of the metal portion.


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