The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Aug. 26, 2002
Junwei Bao, Santa Clara, CA (US);
Wen Jin, Sunnyvale, CA (US);
Emmanuel Drege, San Jose, CA (US);
Srinivas Doddi, Fremont, CA (US);
Vi Vuong, Fremont, CA (US);
Junwei Bao, Santa Clara, CA (US);
Wen Jin, Sunnyvale, CA (US);
Emmanuel Drege, San Jose, CA (US);
Srinivas Doddi, Fremont, CA (US);
Vi Vuong, Fremont, CA (US);
Timbre Technologies, Inc., Santa Clara, CA (US);
Abstract
A profile parameter value is determined in integrated circuit metrology by: a) determining a diffraction signal difference based on a measured diffraction signal and a previously generated diffraction signal; b) determining a first profile parameter value based on the previously generated diffraction signal; c) determining a first profile parameter value change based on the diffraction signal difference; d) determining a second profile parameter value based on the first profile parameter value change; e) determining a second profile parameter value change between the first and second profile parameter values; f) determining if the second profile parameter value change meets one or more preset criteria; and g) when the second profile parameter value change fails to meet the one or more preset criteria, iterating c) to g) using as the diffraction signal difference in the iteration of step c), a diffraction signal difference determined based on the measured diffraction signal and a diffraction signal for the second profile parameter value previously determined in step d), and as the first profile parameter value in the iteration of step e), the second profile parameter value previously determined in step d).