The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
May. 29, 2002
Applicant:
Masaru Suzuki, Nirasaki, JP;
Inventor:
Masaru Suzuki, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3102 ; G01R 3126 ;
U.S. Cl.
CPC ...
Abstract
A probe card conveyorcomprises a probe card conveyor, a bodyprovided with the probe card conveyor, and coupling mechanismsprovided in a plurality of positions on that side of the bodywhich is opposed to the probe deviceand coupled individually to four coupled fittingsof the probe device. Further, the probe card conveyorcomprises a probe card mounting mechanismfor transferring a probe cardin the Y-direction and a lift mechanismfor raising and lowering the probe card mounting mechanism