The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Mar. 13, 2002
Applicant:
David Mccann, Chandler, AZ (US);
Inventor:
David McCann, Chandler, AZ (US);
Assignee:
Amkor Technology, Inc., Chadler, AZ (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2150 ;
U.S. Cl.
CPC ...
Abstract
A micromachine package includes a micromachine chip having a front surface and a micromachine area on the front surface. The micromachine package further includes a substrate having at least one vent extending through the substrate. A seal layer extends between the front surface of the micromachine chip and an upper surface of the substrate. The vent extends to the seal layer directly opposite of a cavity defined by an upper surface of the seal layer and the front surface of the micromachine chip. The micromachine area is located within the cavity.