The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2004
Filed:
May. 07, 2002
Applicant:
Inventors:
Yun-Hung Shen, Hsinchu, TW;
Bih-Huey Lee, Hsinchu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/188 ;
U.S. Cl.
CPC ...
G01N 2/188 ;
Abstract
A new method is provided for monitoring silicon quality, the new method is applied at the time of pre-salicidation of the silicon substrate. The optical refractive index of the pre-salicide substrate is monitored, this monitoring provides insight into the quality of the silicon substrate at that time of a substrate processing cycle.