The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Mar. 12, 2003
Jens Luedecke, Aalen, DE;
Christoph Zazcek, Heubach, DE;
Alexandra Pazidis, Aalen, DE;
Jens Ullmann, Oberkochen, DE;
Annette Muehlpfordt, Aalen, DE;
Michael Thier, Moegglingen, DE;
Stefan Wiesner, Lauchheim, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A method and a device for decontaminating optical surfaces, in particular for decontaminating the surfaces of beam-guiding optics employing UV-radiation in a cleansing atmosphere. The wavelength of the UV-radiation employed falls within a range where oxygen strongly absorbs and the cleansing atmosphere has an oxygen concentration less than that of air. The method and device have application to, e.g., cleaning the surfaces of the beam-guiding optics of microlithographic projection-exposure systems.