The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Aug. 07, 2002
Applicant:
Inventors:
John M. Aitren, South Burlington, VT (US);
Fen Chen, Williston, VT (US);
Kevin L. Condon, Essex Junction, VT (US);
Mark F. Dionne, Burlington, VT (US);
Gregory E. Nuttall, Milton, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/126 ;
U.S. Cl.
CPC ...
G01R 3/126 ;
Abstract
A method and structure tests devices on a wafer by applying an electrical bias to the devices and simultaneously monitoring emitted light from all of the devices. The emitted light indicates locations of defective devices and records time-based images of the emitted light across the wafer.