The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2004
Filed:
Oct. 22, 2002
Applicant:
Inventors:
Thomas J. Dunn, Penfield, NY (US);
Andrew W. Kulawiec, Fairport, NY (US);
Mark J. Tronolone, Fairport, NY (US);
Assignee:
Corning-Tropel, Fairport, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 ; G01N 2/100 ;
U.S. Cl.
CPC ...
G01B 9/02 ; G01N 2/100 ;
Abstract
A scanning interferometer employs dual interferometer modules at different wavelengths to expand a dynamic range of measurement, a compound probe for measuring multiple surfaces, and a confocal optical system for distinguishing between the surfaces measured by the compound probe. Within the compound probe, miniature optics divide a test beam into two sub-test beams that are focused normal to different test surfaces. Both sub-test beams contain the different wavelengths. A separate interferometer monitors movements of the compound probe for producing absolute measures of the test surfaces.