The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2004
Filed:
Sep. 22, 2000
Masahito Kobayashi, Fuchu, JP;
Kazunari Ishii, Nirasaki, JP;
Tokyo Electron Limted, Tokyo, JP;
Abstract
A probing method including the steps of moving a main chuck to align an object of inspection on the main chuck with probes of a probe card located over the main chuck. The method includes moving the main chuck toward the probe card, thereby bringing electrodes of the object of inspection into contact with the probes, and overdriving the main chuck toward the probe card while measuring a load applied to the object of inspection by contact with the probe and controlling the movement of the main chuck in accordance with the measured load. The method also includes inspecting the electrical properties of the object of inspection using the probes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile