The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2004
Filed:
May. 23, 2003
Applicant:
Inventors:
Soichiro Ozawa, Kawasaki, JP;
Shan Sun, Colorado Springs, CO (US);
Hideyuki Noshiro, Kawasaki, JP;
George Hickert, Colorado Springs, CO (US);
Katsuyoshi Matsuura, Kawasaki, JP;
Fan Chu, Black Forest, CO (US);
Takeyasu Saito, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/18242 ;
U.S. Cl.
CPC ...
H01L 2/18242 ;
Abstract
A ferroelectric random access memory has a ferroelectric capacitor formed of a stacking of a lower electrode, a PZT film and an upper electrode of SrRuO , wherein the PZT film includes pinholes, with a pinhole density of about 17 &mgr;m or less.