The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2004
Filed:
Jun. 25, 2002
Hong-Qiang Lu, Fremont, CA (US);
Wei-Jen Hsia, Sunnyvale, CA (US);
Wilbur G. Catabay, Saratoga, CA (US);
LSI Logic Corporation, Milpitas, CA (US);
Abstract
The present invention is directed to a semiconductor structure including a semiconductor substrate having at least one overlying layer formed thereon. The at least one overlying layer including at least one layer of dielectric material. The at least one layer of dielectric material including a protected region having a first dielectric constant and another porous region having a second dielectric constant wherein the value for the second dielectric constant is less than the first dielectric constant. The porous region having been formed by the implantation of a porosity inducing material into the porous region and subsequent annealing. A method for forming such structures is also included.