The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2004
Filed:
Mar. 07, 2003
Applicant:
Inventors:
Errol Todd Ryan, Austin, TX (US);
Cindy K. Goldberg, Austin, TX (US);
Yuri Solomentsev, Allen, TX (US);
Yeong-Jyh T. Lii, Austin, TX (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/131 ;
U.S. Cl.
CPC ...
H01L 2/131 ;
Abstract
The present invention provides a low-k dielectric constant structure and method of forming the same on a substrate that features having a dielectric layer with differing regions of density and . To that end, the method includes depositing, upon the substrate, a dielectric layer having first and second density regions. The density associated with the second density region being greater than the density associated with the first density region, and the first density region being disposed between the substrate and the second density region.