The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2004
Filed:
Jul. 20, 2000
John W. Dixon, Ypsilanti, MI (US);
Jeffrey S. White, Ann Arbor, MI (US);
Frederick P. LaPlant, Ann Arbor, MI (US);
Perceptron, Inc., Plymouth, MI (US);
Abstract
In a measurement system wherein time-varying physical signals containing frequency information related to a physical parameter of an object are measured to obtain corresponding time-varying measurement signals, a method and system are disclosed for processing the measurement signals to obtain a value for the physical parameter by first extracting the frequency information from the measurement signals. The frequency information includes at least one desired frequency. The physical signals are electromagnetic signals. The object is a film such as a layer formed on a substrate, the physical parameter may be thickness of the layer.