The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2004
Filed:
May. 20, 2003
Applicant:
Inventors:
Hossein Rojhantalab, Aloha, OR (US);
Chi-Hwa Tsang, Beaverton, OR (US);
Sean W King, Hillsboro, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 2/900 ;
U.S. Cl.
CPC ...
B24B 2/900 ;
Abstract
A method and system for reclaiming virgin test wafers by polishing a very thin layer from the wafer surface, applying a low down force between the wafer and the pad, with a dilute, low basic slurry. By polishing only a few hundred Angstroms of silicon from the wafer surface, a virgin test wafer may be repeatedly reclaimed and reused for periodic defect monitoring.