The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2004
Filed:
Apr. 01, 2003
Apparatus, system, and method for precision positioning and alignment of a lens in an optical system
Michael F. Meehan, Southbury, CT (US);
David G. Taub, Stamford, CT (US);
Daniel N. Galburt, Wilton, CT (US);
ASML Holding N.V., , NL;
Abstract
An apparatus, system, and method for precision positioning and alignment of a lens in an optical system. The apparatus includes a support, a lever having a pivot point, and a first actuator and a second actuator coupled to the lever and to the support. The first actuator and the second actuator are used to position the lever and thereby position the lens. The first actuator is used to make finer position adjustments of the lever than are made by the second actuator. In one embodiment, the first actuator and the second actuator are pneumatic bellows. In another embodiment, the first actuator and the second actuator are electromechanical devices. A spring can be used to apply a biasing force to the lever.